Vacuum-compat­ible Miniature Stages with Sub-Nanometer Resolution

Physik Instrumente (PI) has introduced vacuum-compat­ible versions of the LPS-24 series: Under vacuum condi­tions down to 10-6 hPa, the miniature stages of only 24 mm in width achieve a sub-nanometer resolution over a travel range of 15 mm.

Thus, they fulfill important requirements for the posi­tioning of optical and mechanical components or for the adjust­ment and manipulation of samples in vacuum with a confined space. The position is measured with an integrated linear en­coder that has a resolution of 150 nm or 20 nm. The Company’s own linear encoder PI One even achieves a resolution of 0.5 mm and a minimum step size of 1 nm. A version of LPS-24 for ultra-high vacuum up to 10-9 hPa is available.