Enhanced Resolution in the Low kv Region

With EVO HD, Carl Zeiss introduced its latest innovation in the conventional Scanning Electron Microscopy (C-SEM) market segment. Delivering much higher resolution at low acceleration voltages compared to present conventional SEM, the EVO HD introduces High Definition to electron microscopy.

The technological basis for this achievement is the new EVO HD source which features a higher source brightness. This brightness results in an improvement in resolution at low-kV relative to conventional tungsten SEMs. The improved source properties also aid analytical applications with a 30 % increase in resolution at 30kV and 1nA.