Highest linearity in Atomic Force Microscopy (AFM)

Park Systems XE (which stands for crosstalk elimination) Atomic Force Microscopes provide completely eliminated background curvature thanks to the flexure XY scanners and show no bowing even on scans of the flattest samples (see image). This enables precision nanometrology for the most challenging problems in research and industry. Position sensors provide linear feedback control for the high accuracy, high precision measurements.

Also the Z (vertical) movement is completely decoupled from the other axes, and has a very high resonance frequency. This does not only guarantee highest precision metrology measurements, it also is a precondition for the True Non-Contact Mode, one of the distinctive advantages of Park Systems’ XE-AFMs. It is a powerful method which enables AFM users to image and measure samples that other measurement or imaging techniques can not. Besides that, AFM tips are preserved from wear and even high resolution tips with very fine tip radius stay sharp for a very long time
A variety of new hardware and software features have been added to the Park XE AFM’s recently.

High Voltage Scanning Kelvin Probe Microscopy or Piezo Force Microscopy is for example possible up to 175 Volt. Or there is the new adaptive scan function to adapt the scan speed to the sample surface topography.
Park Systems AFM are distributed in Europe by the Schafer Technology group. Contact your nearest Schaefer office to obtain further information.