08/03/2009 • Metrology • Sensor Technology

Sensors deliver nanometre resolution at -269°C

New capacitive sensors from Micro-Epsilon’s capaNCDT series provide nanometre resolution at an ambient temperature of 4°Kelvin. These sensors are specially developed for particularly low ambient temperatures. The sensors must provide identical results at -269°C as they do at room temperature.

This is possible due to the use of special materials for the sensor and cable, as well as a new design that provides very stable measurements. The sensors are not influenced by extreme ambient conditions. They are used, for example, in nano-positioning units for atomic force microscopes (ATMs). During these measurements, the sensors, which are located in an ultra-high vacuum, are exposed to extreme temperatures and strong electromagnetic fields. Nevertheless, the sensors achieve a precision of less than 5nm.

The sensors can be operated using controllers from the capaNCDT series. Depending on customer requirements and the required quantities, the sensors are manufactured with various measuring ranges. As a specialist in customised solutions, the sensors can be modified for other special environments and application areas.

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Micro-Epsilon Messtechnik GmbH & Co. KG

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94496 Ortenburg

Phone: +49 8542 168-0
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