Wafer Inspection

As part of its extended product portfolio of inspection solutions for semiconductors, the desktop MX100IR system from Viscom is the ideal solution for inspection of bare wafers, chips, MEMS, wafer bonds, SOIs and FlipChips. This system with manual loading is primarily suited for inspection of smaller lots. It can also be used for applications in the photovoltaic sector. The wafers can be composed of silicon, gallium arsenide or III-IV composites. Silicon, with almost all dopings, is transparent to the scalable system light sources in the near-infrared range wavelength, so even subsurface defects can be inspected to a high resolution with ease. Evaluation is based on specialized inspection algorithms which positively locate defects such as voids, seam widths, etc. Complete statistical process control is also possible.