Wide Bandgap MiniPL/Raman Spectrometer

Measurement of photoluminescence (PL) spectra from semiconductor materials is an important characterization method and is widely accepted for providing information on carrier doping levels, alloy composition, bandgap and edge effects, etc. The ability to measure UV Resonance Raman spectra adds specificity and enhanced characterization of materials. These measurements are important both for research, device characterization and process monitoring. The Deep UV (DUV) MiniPL/Raman Spectrometer from Photon Systems provides the most compact and inexpensive instrument available at these wavelengths. Enabling PL and Raman spectra measurement of semiconductor materials with bandgap up to about 5.5 eV corresponding to AlGaN with Al concentrations up over 80%.

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