SU-70 Large Chamber Analytical FESEM

The SU-70 large chamber analytical FESEM features a unique dual mode objective lens, coupled with high probe current for super-fast analysis to provide a perfect balance between ultra-high resolution imaging and analysis in a single instrument. A new Schottky emission electron gun delivers probe current up to 200 nA for fast, stable analysis while the new dual mode objective lens allows the microscope to be operated under near in-lens conditions for ultra-high resolution, or in Field-Free mode for optimum EBSP and magnetic sample analysis.

Beam deceleration technology enables high resolution ultra-low voltage imaging. Hitachi’s patented Super ExB energy filter gives highly flexible, efficient signal collection for reducing the effects of charge in the image, compositional-contrast imaging and more.

The specimen chamber can accommodate samples up to 150 mm in diameter, yet features 15 accessory ports, allowing a multitude of analytical accessories to be mounted simultaneously. These include EDX, WDX (both wavelength and PBS), EBSP, cathodoluminescence, YAG backscattered detector, transmitted electron detector, cryo-transfer and chamberscope.