07/25/2008 • Image processing / Optical metrology • Microscopy / Imaging

ULTRA PLUS - Ultra-High-Resolution Imaging of Non-Conductive Samples

Unique charge compensation technology from Carl Zeiss SMT enables usage of in-lens SE and EsB detectors with non-conductive samples.

Ceramics, polymers, fibre optics and many more samples are not really rewarding specimens for electron microscopy, due to electrostatic charging. ULTRA plus Scanning Electron Microscope (SEM) with unique technology for charge compensation enables for the first time, high resolution, stable and noise-free images from such samples. This technological advancement was specifically developed for satisfying increasing customer demands in analytical research, development and testing of advanced materials. For the purpose of charge neutralization, a proprietary gas-injection system enables for a local flush application of an inert gas. Thereby, electrostatic charging of samples is neutralized and detection of secondary electrons (SE) as well as backscattered electrons (BSE) becomes feasible. Numerous applications in life sciences, materials analysis and semiconductors will profit from this development.

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Carl Zeiss SMT

Carl-Zeiss-Str. 56
73447 Oberkochen

Phone: +49 (0) 7364/203836
Fax: +49 (0) 7364/204343