LYRA Focused Ion Beam SEM

The LYRA is a favorable combination of the electron and ion sources and optical columns attached on one chamber. It extends imaging qualities of the scanning electron microscope with the possibility of surface modification by a focused ion beam.

LYRA Specific Features:

• The complete setup of SEM, FIB, and optionally GIS for all jobs
• FIB/SEM integrated controlling and imaging software
• Pattern programming for milling, deposition and lithography
• Simultaneous SEM imaging and FIB milling/imaging
• All excellent features of Tescan’s SEM preserved