05/30/2007 • Automation • Drive Tech

HiMag™

High pumping speed, high gas throughput.
Pfeiffer Vacuum has expanded its line of magnetically levitated turbopumps with integrated drive electronics to include the HiMag 3400. The HiMag 2400 and HiMag 3400 are characterized by their especially high pumping speeds, high compression and high gas throughput.

Flexible applications.

The HiMag pumps have IP 54 protection class which means they are protected against dust and water spray from the environment. This makes these pumps especially robust and suitable for industrial applications. In addition to industrial applications, HiMag pumps are also employed in coating processes, in research & development and in the semiconductor industry. Since their high backing vacuum compatibility is achieved without a Holweck or Gaede stage, they can also be employed in critical processes (particulate contamination, high gas loads, corrosive gases).

Safe and reliable.

Constant rotor monitoring by means of sensors supports stable operation of the pumps in every operating state. Water cooling, which is kept at the optimum temperature by means of the electronics, also contributes to reliable pump operation. The low vibration of the pumps means that they can be employed in applications requiring minimum vibration in the low frequency range. Magnetic-levitation bearings make the pumps maintenance free.

No need for cumbersome and costly cabling.

HiMag pumps feature integrated drive electronics which eliminates the need for cumbersome and costly cabling. It also eliminates the need for rack space that would normally be required to mount the electronics controller. The combination venting and sealing gas valve enables the pumps to be stopped in only a fraction of the time required by conventional magnetic-levitation turbopumps. It additionally affords reliable control of sealing gas when operated with corrosive or aggressive media.
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Pfeiffer Vacuum

Berliner Str. 43
35614 Aßlar

Phone: +49 (0) 6441/ 802- 0
Fax: +49 (0) 6441/ 802- 202