SEM Large Specimen Sputter Coater
Quorum Technologies has launched the Q300 series of sputter coaters, suited for sputtering a single large diameter specimen (e.g. a wafer) up to 8” (200 mm) or smaller multiple specimens over a similar diameter. The Q300 is available in three formats: the Q300R T is a low cost rotary pumped coater for noble metals; the Q300T T a turbomolecular pumped platform ideal for both oxidizing and non-oxidizing metals and the Q300T D, a dual head system which will sequentially deposit two different metals without the need to break vacuum. To ensure even coating deposition three individual sputtering heads are fitted (two on the dual head version).